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Microelectromechanical systems (MEMS)

Published 10.01.2012 Presenter Anton Pankratov

Microelectromechanical systems (MEMS)

MEMS is the technologies and devices combining micromechanical and microelectronic components.
MEMS devices are usually made on a silicon substrate using micro-processing technology, identical to the technology of production of single-chip integrated circuits.
Despite the fact that the electronics industry provides large-scale demand for silicon industry ...